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BROADBAND SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER

09/76,673 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed May 12, 1998
Examiner ZANDRA SMITH, V
Class 356
Art Group 2877
Patent No. 5,973,787
Case Type Utility - 356/369000
Status Patented Case
Parent 08/685,606 Patented
Child 09/345,560 Patented
Child 09/619,456 Patented
Child 09/944,831 Patented
Child 10/206,428 Patented
Child 10/653,306 Patented
Last Updated: 5 years, 9 months ago
Date # Transaction