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Method and apparatus for trench isolation process with pad gate and trench edge spacer elimination

09/644,282 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Aug. 22, 2000
Examiner JOSETTA JONES, I
Class 438
Art Group 2812
Patent No. 6,358,801
Case Type Utility - 438/424000
Status Patented Case
Parent 09/32,231 Patented
Last Updated: 4 years, 4 months ago
Date # Transaction