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Inventor

Zhian He

Applicant

Lam Research Corporation

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LAM RESEARCH CORPORATION

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METHOD AND APPARATUS FOR DYNAMIC CURRENT DISTRIBUTION CONTROL DURING ELECTROPLATING

14/67,616 | U.S. Patent Application

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Location ELECTRONIC

Filed Oct. 30, 2013

Examiner BRYAN D RIPA

Class 205

Art Group 1754

Patent No. 9,909,228

Case Type Utility - 205/096000

Status Patented Case

Parent 61/730,285 Expired

Child 15/873,660 Abandoned

Last Updated: 3 years, 5 months ago

Date	#	Transaction
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METHOD AND APPARATUS FOR DYNAMIC CURRENT DISTRIBUTION CONTROL DURING ELECTROPLATING

14/67,616 | U.S. Patent Application

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