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Displaying 39-53 of 114 results

2013 Exhibit: Deposition Transcript of Dr Rubloff July 5, 2018

Document IPR2017-01417, No. 2013 Exhibit - Deposition Transcript of Dr Rubloff July 5, 2018 (P.T.A.B. Jul. 13, 2018)

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1028 Exhibit: Exhibit 1028

Document IPR2017-01417, No. 1028-36 Exhibit - Exhibit 1028 (P.T.A.B. Jul. 2, 2018)

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1025 Exhibit: Exhibit 1025

Document IPR2017-01417, No. 1025-33 Exhibit - Exhibit 1025 (P.T.A.B. Jul. 2, 2018)

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1027 Exhibit: Exhibit 1027

Document IPR2017-01417, No. 1027-35 Exhibit - Exhibit 1027 (P.T.A.B. Jul. 2, 2018)

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1026 Exhibit: Exhibit 1026

Document IPR2017-01417, No. 1026-34 Exhibit - Exhibit 1026 (P.T.A.B. Jul. 2, 2018)

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1029 Exhibit: Exhibit 1029

Document IPR2017-01417, No. 1029-37 Exhibit - Exhibit 1029 (P.T.A.B. Jul. 2, 2018)

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1030 Exhibit: Exhibit 1030

Document IPR2017-01417, No. 1030-38 Exhibit - Exhibit 1030 (P.T.A.B. Jul. 2, 2018)

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1029 Exhibit: Exhibit 1029

Document IPR2017-01417, No. 1029 Exhibit - Exhibit 1029 (P.T.A.B. Jul. 2, 2018)

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1025 Exhibit: Exhibit 1025

Document IPR2017-01417, No. 1025 Exhibit - Exhibit 1025 (P.T.A.B. Jul. 2, 2018)

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1027 Exhibit: Exhibit 1027

Document IPR2017-01417, No. 1027 Exhibit - Exhibit 1027 (P.T.A.B. Jul. 2, 2018)

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2011 Exhibit: Fonash, An Overview of Dry Etching Damage and Contamination Effe...

Document IPR2017-01417, No. 2011-31 Exhibit - Fonash, An Overview of Dry Etching Damage and Contamination Effects (P.T.A.B. Mar. 29, 2018)

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2012 Exhibit: Yabumoto, Surface Damage on Si Substrates Caused by Reactive Sp...

Document IPR2017-01417, No. 2012-32 Exhibit - Yabumoto, Surface Damage on Si Substrates Caused by Reactive Sputter Etching (P.T.A.B. Mar. 29, 2018)

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2009 Exhibit: Comprehensive Dictionary of Electrical Engineering, 2nd Ed

Document IPR2017-01417, No. 2009-29 Exhibit - Comprehensive Dictionary of Electrical Engineering, 2nd Ed (P.T.A.B. Mar. 29, 2018)

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2007 Exhibit: Silicon Dioxide SiO2 and Silicon Nitride Si3N4 Properties

Document IPR2017-01417, No. 2007-27 Exhibit - Silicon Dioxide SiO2 and Silicon Nitride Si3N4 Properties (P.T.A.B. Mar. 29, 2018)

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2006 Exhibit: Silicon Processing for the VLSI Era Wolf

Document IPR2017-01417, No. 2006-26 Exhibit - Silicon Processing for the VLSI Era Wolf (P.T.A.B. Mar. 29, 2018)

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