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Displaying 99-113 of 114 results

1002 Exhibit: Exhibit 1002

Document IPR2017-01417, No. 1002 Exhibit - Exhibit 1002 (P.T.A.B. May. 12, 2017)

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1021 Exhibit: Exhibit 1021

Document IPR2017-01417, No. 1021 Exhibit - Exhibit 1021 (P.T.A.B. May. 12, 2017)

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1028 Exhibit: Exhibit 1028

Document IPR2017-01417, No. 1028 Exhibit - Exhibit 1028 (P.T.A.B. Jul. 2, 2018)

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2005 Exhibit: US 6,441,418 Shields

Document IPR2017-01417, No. 2005 Exhibit - US 6,441,418 Shields (P.T.A.B. Mar. 29, 2018)

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2012 Exhibit: Yabumoto, Surface Damage on Si Substrates Caused by Reactive Sp...

Document IPR2017-01417, No. 2012 Exhibit - Yabumoto, Surface Damage on Si Substrates Caused by Reactive Sputter Etching (P.T.A.B. Mar. 29, 2018)

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1003 Exhibit: Exhibit 1003

Document IPR2017-01417, No. 1003 Exhibit - Exhibit 1003 (P.T.A.B. May. 12, 2017)

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1015 Exhibit: Exhibit 1015

Document IPR2017-01417, No. 1015 Exhibit - Exhibit 1015 (P.T.A.B. May. 12, 2017)

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1012 Exhibit: Exhibit 1012

Document IPR2017-01417, No. 1012 Exhibit - Exhibit 1012 (P.T.A.B. May. 12, 2017)

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1030 Exhibit: Exhibit 1030

Document IPR2017-01417, No. 1030 Exhibit - Exhibit 1030 (P.T.A.B. Jul. 2, 2018)

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2011 Exhibit: Fonash, An Overview of Dry Etching Damage and Contamination Effe...

Document IPR2017-01417, No. 2011 Exhibit - Fonash, An Overview of Dry Etching Damage and Contamination Effects (P.T.A.B. Mar. 29, 2018)

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2006 Exhibit: Silicon Processing for the VLSI Era Wolf

Document IPR2017-01417, No. 2006 Exhibit - Silicon Processing for the VLSI Era Wolf (P.T.A.B. Mar. 29, 2018)

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2008 Exhibit: Silicon Nitride Si3N4 Material Properties

Document IPR2017-01417, No. 2008 Exhibit - Silicon Nitride Si3N4 Material Properties (P.T.A.B. Mar. 29, 2018)

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1001 Exhibit: Exhibit 1001

Document IPR2017-01417, No. 1001 Exhibit - Exhibit 1001 (P.T.A.B. May. 12, 2017)

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1005 Exhibit: Exhibit 1005

Document IPR2017-01417, No. 1005 Exhibit - Exhibit 1005 (P.T.A.B. May. 12, 2017)

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1026 Exhibit: Exhibit 1026

Document IPR2017-01417, No. 1026 Exhibit - Exhibit 1026 (P.T.A.B. Jul. 2, 2018)

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