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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER

14/201,409 | U.S. Patent Application

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Location ELECTRONIC
Filed March 7, 2014
Examiner ERIK T PETERSON
Class 438
Art Group 2822
Patent No. 9,082,839
Case Type Utility - 438/460000
Status Patented Case
Parent 14/14,040 Patented
Parent 13/787,032 Patented
Parent 13/767,459 Patented
Parent 13/412,119 Patented
Parent 13/412,119 Patented
Parent 61/452,450 Expired
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Last Updated: 5 months ago
Date # Transaction