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Inventors

Chris Johnson David Johnson David Pays-Volard Russell Westerman Linnell Martinez Rich Gauldin Gordon M. Grivna

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Plasma-Therm LLC

Assignee

PLASMA-THERM, LLC

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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER

16/132,040 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 14, 2018

Examiner ERIK T PETERSON

Class 438

Art Group 2822

Case Type Utility - 438/460000

Status Notice of Allowance Mailed -- Application Received in Office of Publications

Parent 14/842,365 Patented

Parent 13/764,177 Patented

Parent 13/412,119 Patented

Parent 61/452,450 Expired

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER

16/132,040 | U.S. Patent Application

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